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Volumn 13, Issue 11, 2003, Pages 487-489

Integrated Antennas on Si With over 100 GHz Performance, Fabricated Using an Optimized Proton Implantation Process

Author keywords

Antenna; Implantation; Loss; RF; Transmission line

Indexed keywords

BANDWIDTH; ELECTRIC LINES; ION IMPLANTATION; PROTONS; RESONANCE; SILICON WAFERS; WIRELESS TELECOMMUNICATION SYSTEMS;

EID: 0242406122     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2003.817146     Document Type: Article
Times cited : (68)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.