Development of a high energy resolution X-ray microcalorimeter using Ti/Au TES

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3893, Issue , 1999, Pages 241-249

  Kudo, Hiroyuki ^a   Yokoyama, Yuichi ^a   Shoji, Shuichi ^a   Oshima, Tohru ^a   Aruga, Youichi ^a   Maegami, Kana ^a   Fujimoto, Ryuichi ^a   Toshiyuki, Miyazaki ^a   Mitsuda, Kazuhisa ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; CALORIMETERS; GOLD; METALLOGRAPHIC MICROSTRUCTURE; MICROMACHINING; MICROSENSORS; RADIATION DETECTORS; SILICON; SUBSTRATES; SUPERCONDUCTING MATERIALS; TITANIUM; X RAYS;

HIGH ENERGY RESOLUTION X-RAY MICROCALORIMETERS; SILICON BULK MICROMACHINING; TRANSITION EDGE SENSORS (TES);

MICROELECTRONICS;

EID: 0033332398     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)