Process Simulation for Advanced Large Area Optical Coatings

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2003, Pages 241-247

  Pflug, A ^a   Szyszka, B ^a   Sittinger, V ^a   Niemann, J ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Process simulation; Reactive deposition; Sputter deposition; Sputtering targets

Indexed keywords

COMPOSITION; COMPUTER SIMULATION; MAGNETRON SPUTTERING; MONTE CARLO METHODS; OXIDATION;

PROCESS KINETICS;

OPTICAL COATINGS;

EID: 0242385301     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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