Non-linear effect on radiation damage of silicon by cluster ion bombardment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 787-791

  Liu, Jiarui ^a   Wang, Xuemei ^a   Shao, Lin ^a   Lu, Xinming ^a   Chu, Wei Kan ^a  

^a UNIVERSITY OF HOUSTON   (United States)

Author keywords

Cluster; Cluster ion; Cluster solid interaction; Non linear effect

Indexed keywords

AGGREGATES; ION BEAMS; RADIATION DAMAGE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SPUTTERING;

NON-LINEAR EFFECT;

ION BOMBARDMENT;

EID: 0036569049     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01305-2     Document Type: Conference Paper

References (14)