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Volumn 767, Issue , 2003, Pages 79-85
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Single Asperity Chemical Mechanical Wear Studied by Atomic Force Microscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
GLASS;
SILICON NITRIDE;
SUBSTRATES;
CHEMICAL MECHANICAL WEAR;
WEAR OF MATERIALS;
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EID: 0242322632
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-767-f2.1 Document Type: Conference Paper |
Times cited : (1)
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References (6)
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