Sputtering due to Coulomb explosion in highly charged ion bombardment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 212, Issue 1-4, 2003, Pages 436-441

  Terasawa, M ^a   Insepov, Z A ^a   Sekioka, T ^a   Valuev, A A ^b   Mitamura, T ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b NONE

Author keywords

Coulomb explosion; Electronic excitation; Highly charged ion; Molecular dynamics calculation; Secondary ion emission; Shock wave; Sputtering

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; IONIZATION; MOLECULAR DYNAMICS; POTENTIAL ENERGY; RELAXATION PROCESSES; SHOCK WAVES; SILICON; SPUTTERING; WAVE PROPAGATION;

COULOMB EXPLOSION;

ION BOMBARDMENT;

EID: 0242306074     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)01497-6     Document Type: Conference Paper

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