Photoresist-free printing of amorphous silicon thin-film transistors

Applied Physics Letters

Volumn 83, Issue 15, 2003, Pages 3207-3209

  Miller, Scott M ^a   Troian, Sandra M ^a   Wagner, Sigurd ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; DIELECTRIC MATERIALS; ELECTROSTATIC PRINTING; ETCHING; MASKS; PHOTORESISTS; POLYIMIDES; TRANSPARENCY;

PATTERN REGISTRATION;

THIN FILM TRANSISTORS;

EID: 0242304430     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1618364     Document Type: Article

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