Molecular Beam Deposition of Low-Resistance Polycrystalline InAs

Proceedings IEEE Lester Eastman Conference on High Performance Devices

Volumn , Issue , 2002, Pages 207-212

  Scott, D ^a   Urteaga, M ^a   Parthasarathy, N ^a   English, J H ^a   Rodwell, M J W ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC RESISTANCE; ELECTRON MOBILITY; MOLECULAR BEAM EPITAXY; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DOPING; TITANIUM;

DEPOSITION RATES;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0242270764     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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