Argon ion stimulated conversion between CFx (x = 0-3) chemical states and fluorine depletion in fluorocarbon films studied by X-ray photoelectron spectroscopy

Applied Surface Science

Volumn 220, Issue 1-4, 2003, Pages 19-25

  Tong, S W ^a   Fung, M K ^a   Lee, C S ^a   Lifshitz, Y ^a   Lee, S T ^a   Hoffman, A ^a,b  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

AR XPS; Depletion; Fluorocarbon

Indexed keywords

BONDING; COMPOSITION; IRRADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

ION STIMULATED CONVERSION;

FLUOROCARBONS;

EID: 0142217312     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00743-8     Document Type: Article

References (20)

1. Kay E., Coburn J., Dilks A. Top. Curr. Chem. 94:1980;1.
2. M.M. Millard, in: L.M. Lee (Ed.), Characterization of Metal and Polymer Surfaces, vol. 2, Academic Press, New York, 1977.
3. Millard M.M., Pavlath A.E. J. Macromol. Sci. Chem. A10:1976;576.
4. Clarotti G., Schue F., Sledz J., Geckeler K.E., Göpel W., Orsetti A. J. Membr. Sci. 61:1991;289.
5. Clarotti G., Aoumar A.A.B., Schue F., Sledz J., Geckeler K.E., Flösch D., Orsetti A. Makromol. Chem. 192:1991;2581.
6. Hung L.S., Zheng L.R., Mason M.G. Appl. Phys. Lett. 78:2001;673.
7. Hoffman A., Gouzman I., Brener R. Appl. Phys. Lett. 64:1994;845.
8. Park C.S., Lee J.S., Kang J.Y., Lee J.Y. Appl. Phys. Lett. 59:1991;1767.
9. Khizroev S., Litvinov D. Appl. Phys. Lett. 79:2001;353.
10. Devolder T., Chappert C., Chen Y., Cambril E., Bernas H., Jamet J.P., Ferré J. Appl. Phys. Lett. 74:1999;3383.
11. Darraud C., Bennamane B., Gagnadre C., Decossas J.L., Vareille J.C., Stejny J. Refractive-index modifications of some polymeric materials by ion beams. Appl. Opt. 33(16):1994;3338-3341.
12. Bennamane B., Decossas J.L., Gagnadre C., Vareille J.C. Optical waveguide fabrication by ion beams in the PADC-polymer. Nucl. Instrum. Methods. B62:1991;103-108.
13. Zhang L., Townsend P.D., Chandler P.J., Kulisch J.R. Ion implanted waveguides in polymethylmethacrylate. J. Appl. Phys. 66(9):1989;4547-4548.
14. Bartko J., Hall B.O., Schoch K.F. J. Appl. Phys. 59:1986;1111.
15. Vendatesan T., Forrest S.R., Kaplan M.L., Murray C.A., Schmidt P.H., Wilkens B.J. J. Appl. Phys. 54:1983;3150.
16. Faria R.M., Gross B., Filho R.G. J. Appl. Phys. 62:1987;1420.
17. R. D'Agostino, F. Cramarossa, F. Fracassi, F. Illuzzi, in: R. D'Agostino (Ed.), Plasma Deposition, Treatment, and Etching of Polymers, Academic, Boston, MA, 1990, Chapter 2, p. 95.
18. Chkoda L., Heske C., Sokolowski M., Umbach E., Steuber F., Staudigel J., Stobel M., Simmerer J. Synth. Met. 111:2000;315.
19. V.I. Nefedov, X-ray Photoelectron Spectroscopy of Solid Surfaces, Utrecht, The Netherlands, 1988.
20. R. d'Agostino, in: R. d'Agostino (Ed.), Plasma Polymerization of Fluorocarbons in Plasma Deposition, Treatment, and Etching of Polymers, Academic Press, San Diego, 1990, p. 143.