Future Challenges for MEMS Failure Analysis

IEEE International Test Conference (TC)

Volumn , Issue , 2003, Pages 850-855

  Walraven, Jeremy A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FAILURE ANALYSIS; OPTICAL SWITCHES; SENSORS;

DEVICE DESIGN;

MICROELECTROMECHANICAL DEVICES;

EID: 0142184767     PISSN: 10893539     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. R.W. Beegle, R.W. Brocato, and R.W. Grant, "IMEMS Accelerometer Testing - Test Laboratory Development and Usage," Int. Test Conf., pp.338-347, 1999.
2. J. A. Walraven, "Introduction to Applications and Industries of Microelectromechanical Systems," to be published, proc. of ITC.
3. D. M. Tanner, J. A. Walraven, L. W. Irwin, M. T. Dugger, N. F. Smith, W. P. Eaton, W. M. Miller and S. L. Miller, "The Effect of Humidity on the Reliability of a Microengine", Proceedings of IRPS, San Diego CA, 1999, pp. 189-197.
4. J. A. Walraven, J. M. Soden, E. I. Cole Jr., D. M. Tanner, and R. E. Anderson, "Human body model, machine model, and charge device model ESD testing of surface micromachined microelectromechanical systems (MEMS)," EOS/ESD 2001 Symposium, pp. 3A.6.1 - 3A.6.11.
5. J. A. Walraven, E. I. Cole Jr., L. R. Sloan, S. Hietala, C. P. Tigges, and C. W. Dyck, "Failure Analysis of Radio Frequency (RF) MEMS," Proc. of SPIE, Oct. 2001, vol. 4558pp. 254-259
6. th ISTFA, 2001, pp. 365-372.