IMEMS accelerometer testing - test laboratory development and usage

IEEE International Test Conference (TC)

Volumn , Issue , 1999, Pages 338-347

  Beegle, Richard W ^a   Brocato, Robert W ^a   Grant, Ronald W ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION MEASUREMENT; ACCELEROMETERS; CAPACITORS; COMPUTER SIMULATION; DELTA SIGMA MODULATION; FAST FOURIER TRANSFORMS; MICROELECTROMECHANICAL DEVICES; RESEARCH AND DEVELOPMENT MANAGEMENT; SPECTRUM ANALYSIS; TEST FACILITIES;

INTEGRATED MICROELECTROMECHANICAL SYSTEMS; SOFTWARE PACKAGE EXCEL; STANDARD FREE FALL ACCELERATION;

SEMICONDUCTOR DEVICE TESTING;

EID: 0033326869     PISSN: 10893539     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)