Data preprocessing in peak shape analysis of auger electron spectra

Mikrochimica Acta

Volumn 133, Issue 1-4, 2000, Pages 307-312

  Baunack, Stefan ^a  

^a IFW DRESDEN   (Germany)

Author keywords

Auger electron spectroscopy; Data analysis; Depth profiling; Factor analysis; Principal component analysis

Indexed keywords

EID: 0142178443     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/s006040070111     Document Type: Article

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