The dependence of the preferred orientation and piezoelectric property of Pb(Zr0.52,Ti0.48)O3 (PZT) thin film on the deposition temperature

Ferroelectrics

Volumn 271, Issue , 2002, Pages 27-32

  Song, Han Wook ^a   Shin, Hyunjung ^b   No, Kwangsoo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

AFM; Piezoelectric properties; Preferred orientation; PZT thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; DEPOSITION; MAGNETRON SPUTTERING; PEROVSKITE; PIEZOELECTRICITY; SURFACE ROUGHNESS;

PIEZOELECTRIC PROPERTIES; PIEZOELECTRIC RESPONSE; PREFERRED ORIENTATION; PZT THIN FILMS;

THIN FILMS;

EID: 0142076691     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/713716170     Document Type: Conference Paper

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