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Volumn 83, Issue 12, 2003, Pages 2426-2428

Fluorination of carbon nanotubes in CF4 plasma

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; FLUORINE COMPOUNDS; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0142058390     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1611621     Document Type: Article
Times cited : (144)

References (25)
  • 2
    • 0037051008 scopus 로고    scopus 로고
    • H. Dai, Surf. Sci. 500, 218 (2002).
    • (2002) Surf. Sci. , vol.500 , pp. 218
    • Dai, H.1
  • 19
    • 0004093537 scopus 로고
    • Washington American Chemical Society, Washington
    • J. A. Mucha and D. W. Hess, in Introduction to Microlithography (Washington American Chemical Society, Washington, 1983), pp. 215-285.
    • (1983) Introduction to Microlithography , pp. 215-285
    • Mucha, J.A.1    Hess, D.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.