Micro array type electron multiplier as a two dimensional position sensitive detector

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 295-298

  Fukuda, D ^a   Kawarabayashi, J ^a   Takahashi, H ^a   Iguchi, T ^a   Nakazawa, M ^a   Takahashi, A ^a   Tokue, R ^a   Hirata, Y ^a   Numazawa, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COMPUTER SIMULATION; ETCHING; MICROMACHINING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS;

ANISOTROPIC SILICON ETCHING; POSITION SENSITIVE DETECTORS; PYRAMID TYPE DYNODES;

ELECTRON MULTIPLIERS;

EID: 0030718120     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)