Low-energy ion source characteristics for producing an ultra-fine microbeam

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 113, Issue 1-4, 1996, Pages 75-77

  Ishii, Yasuyuki ^a   Tanaka, Ryuichi ^a   Isoya, Akira ^a  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC DISCHARGES; ELECTRON BEAMS; HYDROGEN; ION BEAMS; LENSES; PARTICLE ACCELERATORS; PARTICLE BEAM DYNAMICS; PARTICLE BEAM EXTRACTION; PLASMAS; TARGETS; VACUUM TECHNOLOGY;

DUOPLASMATRON LIKE ION SOURCE; ION MICROBEAM SYSTEM; LOW ENERGY ION SOURCE; ULTRA FINE MICROBEAM; ULTRA FINE MICROBEAM APPARATUS; UNIFORM ELECTRIC FIELD TYPE ENERGY ANALYZER;

ION SOURCES;

EID: 0030166038     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01308-3     Document Type: Article

References (6)

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3. T. Kamiya, T. Suda and R. Tanaka, Nucl. Instr. and Meth. B 104 (1995) 43.
4. A. Isoya, Proc. Int. Conf. on Application of Nuclear Techniques (Crete, Greece, 1990) p. 334.
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6. J.R. Pierce, Theory and Design of ELECTRON BEAMS (Van Nostrand Reinhold, New York, 1954) p. 20.