Self-polarization in PZT films

Ferroelectrics

Volumn 271, Issue , 2002, Pages 69-74

  Kwok, Kin Wing ^a   Wang, Bing ^a   Chan, Helen Lai Wah ^a   Choy, Chung Loong ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

PZT films; Rf magnetron sputtering; RuO2 Electrodes; Self polarization

Indexed keywords

ELECTRODES; MAGNETRON SPUTTERING; POLARIZATION; SOL-GELS; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

PZT FILMS; RF-MAGNETRON SPUTTERING; RUO2 ELECTRODES; SELF-POLARIZATION;

FERROELECTRIC THIN FILMS;

EID: 0141988412     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/713716216     Document Type: Conference Paper

References (8)

1. Kanno, S. Fujii, T. Kamada, and R. Takayama, Appl. Phys. Lett., 70, 1378 (1997)
2. R. Bruchhaus, D. Pitzer, R. Primig, M. Schreiter, and W. Wersing, Integr. Ferroelectrics, 25, 1 (1999)
3. A.L. Kholkin, K.G. Brooks, D.V. Taylor, S. Hiboux, and N. Setter, Integr. Ferroelectrics, 22, 525 (1998)
4. G.E. Pike, W.L. Warren, D. Dimos, B.A. Tuttle, R. Ramesh, J. Lee, V.G. Keramidas, and J.T. Evans, Appl. Phys. Lett., 66, 484 (1995)
5. C. Dias, M. simon, R. Quad and D.K. Das-Gupta, J. Phys. D: Appl. Phys., 26, 106 (1993)
6. B. Wang, K.W. Kwok, H.L.W. Chan, C.L. Choy, K.Y. Tong, E.Z. Luo, J.B. Xu, and I.H. Wilson, Materials Characterization, in press.
7. J.P. Maria, Ph.D. Thesis, The Pennsylvania State University, USA, 1998.
8. K. Ellmer, R. Cebulla and R. Wendt, Surf. Coat. Sci., 98, 1251 (1998).