A Silicon Microactuator Using Integrated Microfabrication Technology

IEEE Transactions on Magnetics

Volumn 39, Issue 5 II, 2003, Pages 2240-2242

  Lu, Y ^a   Yang, J P ^a   Chen, J ^a   Chen, S X ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Head positioning system; Magnetic recording; MEMS; Microactuator; Microfabrication

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; HARD DISK STORAGE; MAGNETIC HEADS; MAGNETIC RECORDING; MICROELECTROMECHANICAL DEVICES;

HEAD POSITIONING SYSTEM;

MICROACTUATORS;

EID: 0141953930     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2003.815443     Document Type: Article

References (6)

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