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Volumn , Issue , 2003, Pages 228-233

Development of low-force copper contact processes

Author keywords

Deoxidization of Cu; Fritting contact; IC probing

Indexed keywords

COPPER; COPPER OXIDES; ELECTRIC BREAKDOWN; ELECTRIC RESISTANCE; ELECTRODES; HEAT TREATMENT; HYDROGEN; IRON ALLOYS; NICKEL ALLOYS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0141904971     PISSN: 03614395     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (6)

References (8)
  • 2
    • 0009776026 scopus 로고    scopus 로고
    • Characteristics of fritting contacts utilized for micromachined wafer probe cards
    • T. Itoh, T. Suga, G. Engelmann, J. Wolf, O. Ehrmann, H. Reichl, "Characteristics of Fritting Contacts Utilized for Micromachined Wafer Probe Cards", Rev. Sci. Instrum., 71, pp. 2224-2227, 2000.
    • (2000) Rev. Sci. Instrum. , vol.71 , pp. 2224-2227
    • Itoh, T.1    Suga, T.2    Engelmann, G.3    Wolf, J.4    Ehrmann, O.5    Reichl, H.6
  • 3
    • 0036544470 scopus 로고    scopus 로고
    • Characteristics of low force contact process for MEMS probe cards
    • T. Itoh, K. Kataoka, and T. Suga, "Characteristics of Low Force Contact Process for MEMS Probe Cards", Sensors and Actuators, A97-98, pp. 462-467, 2002.
    • (2002) Sensors and Actuators , vol.A97-98 , pp. 462-467
    • Itoh, T.1    Kataoka, K.2    Suga, T.3
  • 6
    • 3743149280 scopus 로고
    • Edited by the Japan Institute of Metals, Maruzen; (in Japanese)
    • Data Book of Metals, 2nd ed. Edited by the Japan Institute of Metals, Maruzen, 1984 (in Japanese).
    • (1984) Data Book of Metals, 2nd Ed.
  • 7
    • 0001655134 scopus 로고    scopus 로고
    • X-ray photoelectron spectroscopy characterization of the oxidation of electroplated and sputter deposited copper surfaces
    • E. Apen, B. R. Rogers and J. A. Sellers, "X-ray photoelectron spectroscopy characterization of the oxidation of electroplated and sputter deposited copper surfaces", J. Vac. Sci. Technol. A A16, pp. 1227-1232, 1998.
    • (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 1227-1232
    • Apen, E.1    Rogers, B.R.2    Sellers, J.A.3
  • 8
    • 0003459529 scopus 로고
    • edited by J. Chastainan and R. C. King, Jr. Physical Electrons, Inc.
    • Handbook of X-ray photoelectron spectroscopy, edited by J. Chastainan and R. C. King, Jr. Physical Electrons, Inc., 1995.
    • (1995) Handbook of X-ray Photoelectron Spectroscopy


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.