Portable phase measuring interferometer using Shack-Hartmann method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5038 I, Issue , 2003, Pages 726-732

  Fujii, Toru ^b   Kougo, Jun ^a   Mizuno, Yasushi ^a   Ooki, Hiroshi ^b   Hamatani, Masato ^a  

^a IC Equipment Div   (Japan)

^b NIKON CORPORATION   (Japan)

Author keywords

On body lens inspection; Wave front aberration

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; LENSES; OPTIMIZATION; PHASE MEASUREMENT; WAVEFRONTS;

EXCIMER EXPOSURE SYSTEM; PORTABLE PHASE MEASURING INTERFEROMETER; SHACK-HARTMANN METHOD; WAVEFRONT ABBERATION;

INTERFEROMETRY;

EID: 0141834994     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482699     Document Type: Conference Paper

References (6)

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