Aberrations of steppers using Phase Shifting Point Diffraction Interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  Venkataraman, P ^a   Smith, B W ^a  

^a ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; DIFFRACTIVE OPTICS; INTERFEROMETRY; OPTICAL INSTRUMENT LENSES; OPTICAL TESTING;

PHASE SHIFTING POINT DIFFRACTION INTERFEROMETRY (PSPDI); POINT DIFFRACTION INTERFEROMETRY; STEPPER LENSES;

PHOTOLITHOGRAPHY;

EID: 0033713390     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)