A methodology to calculate line-end correction feature performance as a function of reticle cost

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 I, Issue , 2003, Pages 441-449

  Melvin III, Lawrence S ^a   Shiely, James P ^a   Rieger, Michael L ^a   Painter, Benjamin ^a  

^a SYNOPSYS INC   (United States)

Author keywords

Bridging; Line end; Pinching; Pullback; Reticle

Indexed keywords

ERROR CORRECTION; FEATURE EXTRACTION; FITS AND TOLERANCES; MASKS; OPTICAL DESIGN; OPTICAL VARIABLES MEASUREMENT;

DESIGN TOLERANCE MARGIN; LINE END CORRECTION; OPTICAL PROXIMITY CORRECTION; PATTERN COMPLEXITY METRIC;

PHOTOLITHOGRAPHY;

EID: 0141833711     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485533     Document Type: Conference Paper

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