An integrated tool for fabrication of electronic components by laser direct-write

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4428, Issue , 2001, Pages 183-188

  Mathews, S A ^a   Duignan, M T ^a   Wells, D N ^a   Atanassova,, P ^a   Kodas, T ^a  

^a Potomac Photonics Inc   (United States)

Author keywords

Integrated passives; Laser direct write; Laser forward transfer; Laser micromachining; Maple DW; Mesoscale patterning

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; LASER PULSES; LOW TEMPERATURE TESTING; MASKS; POWDERS; PULSED LASER DEPOSITION;

LASER DIRECT WRITE DEPOSITION; MASKLESS PATTERNING;

ELECTRONICS PACKAGING;

EID: 0034827914     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Laser direct writing of circuit elements and sensors
2. A novel laser transfer process for direct writing of electronic and sensor materials
3. Novel synthesis of high-definition flat panel display technologies