Identification of contact regions in semiconductor transistors by level-set methods

Journal of Computational and Applied Mathematics

Volumn 159, Issue 2, 2003, Pages 399-410

  Fang, Weifu ^a   Ito, Kazufumi ^b  

^a WEST VIRGINIA UNIVERSITY   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Inverse problem; Level set methods; Semiconductor

Indexed keywords

INVERSE PROBLEMS; PROBLEM SOLVING; SET THEORY; TRANSISTORS;

CONTACT REGIONS;

COMPUTATIONAL METHODS;

MATHEMATICAL METHOD;

EID: 0141750666     PISSN: 03770427     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0377-0427(03)00543-0     Document Type: Article

References (15)

1. Burger M. Engl H. Markowich P.A. Pietra P. Identification of doping profiles in semiconductor devices Inverse Problems 17 2001 1765-1795
2. Busenberg S. Fang W. Identification of semiconductor contact resistivity Quart. Appl. Math. 49 1991 639-649
3. Dennis J.E. Schnabel R.B. Numerical Methods for Unconstrained Optimization and Nonlinear Equations 1983 Prentice-Hall Englewood Cliffs, NJ
4. Fang W. Cumberbatch E. Inverse problems for MOSFET contact resistivity SIAM J. Appl. Math. 52 1992 699-709
5. Fang W. Ito K. Redfern D. Parameter identification for semiconductor diodes by LBIC imaging SIAM J. Appl. Math. 62 2002 2149-2174
6. Haslinger J. Neittanmaaki P. Finite Element Approximation for Optimal Shape Design: Theory and Applications 1988 Wiley New York
7. Ito K. Kunisch K. Li Z. Level-set function approach to an inverse interface problem Inverse Problems 17 2001 1225-1242
8. Jiang G.-S. Peng D. Weighted ENO schemes for Hamilton-Jacobi equations SIAM J. Sci. Comput. 21 2000 2126-2143
9. Litman A. Lesselier D. Santosa F. Reconstruction of a two-dimensional binary obstacle by controlled evolution of a level-set Inverse Problems 14 1998 685-706
10. W.H. Loh, Modeling and measurement of contact resistances, Technical Report No. G830-1, Stanford Electronics Labs., December 1987.
11. Loh W.H. Saraswat K. Dutton R.W. Analysis and scaling of Kelvin resistors for extraction of specific contact resistivity IEEE Electron. Dev. Lett. 6 1985 105-108
12. Osher S.J. Santosa F. Level set methods for optimization problems involing geometry and constraints I: frequencies of a two-density inhomogeneous drum J. Comput. Phys. 171 2001 272-288
13. Osher S.J. Sethian J.A. Fronts propagating with curvature-dependent speed: algorithms based on Hamilton-Jacobi formulations J. Comput. Phys. 79 1988 12-49
14. Sethian J.A. Level Set Methods and Fast Marching Methods 1996 Cambridge University Press Cambridge
15. Sokolowski J. Zolesio J.-P. Introduction to Shape Optimization 1992 Springer Heidelberg