Identification of doping profiles in semiconductor devices

Inverse Problems

Volumn 17, Issue 6, 2001, Pages 1765-1795

  Burger, Martin ^a   Engl, Heinz W ^a   Markowich, Peter A ^b   Pietra, Paola ^c  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^b UNIVERSITY OF VIENNA   (Austria)

^c CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; INVERSE PROBLEMS; PROBLEM SOLVING; SEMICONDUCTOR DIODES; SEMICONDUCTOR DOPING;

DRIFT-DIFFUSION EQUATIONS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035665674     PISSN: 02665611     EISSN: None     Source Type: Journal    
DOI: 10.1088/0266-5611/17/6/315     Document Type: Article

References (49)

1. Stable determinations of conductivity by boundary measurements
2. Optimal stability for elliptic boundary value problems with unknown boundaries
3. Local uniqueness in the inverse conductivity problem with one measurement
4. The boundary inverse problem for the Laplace equation in two dimensions
5. Stable determination of boundaries from Cauchy data
6. On convergence rates for the iteratively regularized Gauss-Newton method
7. Two-dimensional exponential fitting and applications in drift-diffusion models
8. Uniqueness in the inverse conductivity problem for nonsmooth conductivities in two dimensions
9. Stability for an inverse boundary problem of determining a part of a boundary
10. Inverse problems related to crystallization of polymers
11. Iterative regularization of a parameter identification problem occurring in polymer processing
12. Identification of semiconductor contact resistivity
13. Electrical impedance tomography
14. A convergence analysis of iterative methods for the solution of nonlinear ill-posed problems under affinely invariant conditions
15. Convergence of a reconstruction method for the inverse conductivity problem
16. Convergence rates for Tikhonov regularisation of nonlinear ill-posed problems
17. Convergence rate results for iterative methods for solving nonlinear ill-posed problems
18. Inverse problems for metal oxide semiconductor field-effect transistor contact resistivity
19. Identifiability of semiconductor defects from LBIC images
20. Reconstruction of semiconductor doping profile from laser-beam-induced current image
21. On the uniqueness in the inverse conductivity problem with one measurement
22. On existence, uniqueness and asymptotic behavior of solutions of the basic equations for carrier transport in semiconductors
23. A regularizing Levenberg-Marquardt scheme, with applications to inverse groundwater filtration problems
24. A convergence analysis of the Landweber iteration for nonlinear ill-posed problems
25. Optimal control of the drift-diffusion model for semiconductor devices
26. Regularisation of exponentially ill-posed problems
27. Some Newton-type methods for the regularization of nonlinear ill-posed problems
28. Determining conductivity by boundary measurements
29. On the inverse conductivity problem with one measurement
30. A singular perturbation analysis of the fundamental semiconductor device equations
31. Stability of the linearized transient semiconductor device equations
32. Global uniqueness for a two-dimensional inverse boundary value problem
33. The use of Tikhonov regularization in the identification of electrical conductivities from overdetermined boundary data
34. Voltage-current characteristics of multi-dimensional semiconductor devices
35. Time-dependent solutions of a nonlinear system arising in semiconductor theory
36. Well posedness and convergence of some regularization methods for nonlinear ill posed problems
37. A qualitative study on optimized MOSFET doping profiles
38. Closed-loop MOSFET doping profile optimization for portable systems
39. The inverse conductivity problem in two dimensions
40. A global uniqueness theorem for an inverse boundary value problem
41. Theory of flow of electrons and holes in germanium and other semiconductors