Fine Structure of Carbon Films Deposited from a Microwave Low-Pressure Gas Discharge

Technical Physics Letters

Volumn 29, Issue 8, 2003, Pages 649-651

  Alekhin, A A ^a   Suzdal'tsev, S Yu ^a   Yafarov, R K ^a  

^a INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0141653878     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1606777     Document Type: Article

References (10)

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