The kinetics of a diamond-like film growth in a microwave gas discharge plasma

Technical Physics Letters

Volumn 27, Issue 8, 2001, Pages 656-658

  Suzdal'tsev, S Yu ^a   Yafarov, R K ^a  

^a INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035429845     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1398959     Document Type: Article

References (4)

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2. N. N. Bylinkina, S. P. Mushtakova, V. A. Oleǐnik, et al., Pis'ma Zh. Tekh. Fiz,. 22 (6), 43 (1996) [Tech. Phys. Lett. 22, 245 (1996)].
3. A. Ubbelohde and F. Lewis, Graphite and Its Crystalline Compounds (Clarendon Press, Oxford, 1960; Mir, Moscow, 1965).
4. Yu. M. Tairov and V. F. Tsvetkov, Technology of Semiconductor and Dielectric Materials (Vysshaya Shkola, Moscow, 1990).