Formation of a diamond-like phase under conditions of preferential deposition of nondiamond carbon in a microwave gas discharge plasma with electron cyclotron resonance

Technical Physics Letters

Volumn 24, Issue 2, 1998, Pages 135-137

  Suzdal’tsev, S Yu ^a   Sysuev, S V ^a   Yafarov, R K ^a  

^a INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032363654     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1262024     Document Type: Article

References (6)

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6. Thin Films: Interdiffusion and Reactions, edited by J. M. Poate, K. Tu, and J. Meier (Wiley, New York, 1978; Mir, Moscow, 1982).