Fast topography simulation using differential method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 I, Issue , 2003, Pages 92-100

  Zinn, Sonny Y ^a   Kim, Sung Hyuck ^a   Choi, Seong Woon ^a   Sohn, Jung Min ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

Differential method; Finite difference time domain; Topography simulation

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; FINITE DIFFERENCE METHOD; LIGHTING; MASKS; MAXWELL EQUATIONS; THREE DIMENSIONAL; TIME DOMAIN ANALYSIS;

DIFFERENTIAL METHOD; FAST TOPOGRAPHY SIMULATION;

COMPUTER SIMULATION;

EID: 0141610838     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485355     Document Type: Conference Paper

References (6)

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