Chemical Sensors Based on Piezoresistive Cantilever Array

Chinese Physics Letters

Volumn 20, Issue 9, 2003, Pages 1637-1640

  Yu, Xiao Mei ^a   Zhang, Da Cheng ^a   Wang, Cong Shun ^a   Du, Xian Feng ^a   Wang, Xiao Bao ^a   Ruan, Yong ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA;

GAGE FACTORS; HOOGE FACTOR; MEASUREMENT BANDWIDTH; MINIMUM DETECTABLE DEFLECTIONS; PIEZO-RESISTIVE CANTILEVERS; PIEZORESISTIVE CANTILEVER ARRAY; PIEZORESISTIVE MATERIALS; SILICON MICROMACHINING TECHNOLOGY; U-SHAPED; WATER VAPOUR;

NANOCANTILEVERS;

EID: 0141567594     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/20/9/366     Document Type: Article

References (11)

1. Lang H P et al 1999 12th IEEE Int. Conf, on MEMS p 7
2. Boisen A, Thaysen J, Jensenius H and Hansen O 2000 Ultramicrosc. 82 11
3. Baller M K, Lang H P, Fritz J, Gerber Ch, Gimzewski J K, Drechsler U and Rothuizen H 2000 Ultramicrosc. 82 1
4. Battiston F M, Ramseyer J P, Lang H P, Baller M K, Gerber Ch, Gimzewski J K and Meyer E 2001 Sensors Actuators B 77 122
5. Porter T L, Eastman M P, Pace D L and Bradley M 2001 Sensors Actuators A 88 47
6. Yu X M, Thaysen J, Hansen O and Boisen A 2002 J. Appl Phys. 92 6296
7. Hooge F N 1969 Phys. Lett. A 29 139
8. Vandamme L K J 1983 7th Int. Conf. on Noise in Physical Systems Montpellier Amsterdam p 183
9. Yu X M, Zhang D C et al 2003 J. Semiconduct. (at press) (in Chinese)
10. Zhang T, Sun L Y, Xu B K and Jin L L 2000 Instruments Sensors 8 13 (in Chinese)
11. Quan B F, Qi J Q, Wang J Q, Quan H Y and Sun L Y 1998 J. Transducer Technol. 17 6 (in Chinese)