Exact computation of scalar, 2D aerial imagery

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4692, Issue , 2002, Pages 517-528

  Gordon, R L ^a  

^a IBM   (United States)

Author keywords

Aerial image simulation; Hopkins transmission cross coefficients; Lithography; PROLITH; SPLAT

Indexed keywords

FOURIER TRANSFORMS; IMAGING SYSTEMS; INTEGRATION; MASKS; PHOTOLITHOGRAPHY; SILICON WAFERS;

AERIAL IMAGE SIMULATION;

SEMICONDUCTOR DEVICES;

EID: 0036030890     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.475687     Document Type: Conference Paper

References (11)

1. H.H. Hopkins, "On the diffraction theory of optical images", Proc. Roy. Soc. A 217, 408-432 (1953).
2. th Ed. Cambridge: Cambridge Univ. Press (1999), Sec. 8.8.
3. K.K.H. Toh and A.R. Neureuther, "Identifying and Monitoring Effects of Lens Aberrations in Projection Printing", Proc. SPIE 772, 202-209 (1987).
4. N. Cobb and A. Zakhor, "Fast low-complexity mask design", in Proc. SPIE 3334, 313-327 (1995).
5. Y.C. Pati, A.A. Ghazanfarian, and R.F. Pease, "Exploiting Structure in Fast Aerial Image Computation for Integrated Circuit Patterns", IEEE Trans. Semi. Man. 10, 62-74 (1997).
6. E.C. Kintner, "Method for the calculation of partially coherent imagery", Applied Optics 17, 2747-2753 (1978).
7. rd Ed. New York: W.H. Freeman and Co. (1988), p. 496.
8. Matlab R12, version 6.0, from The Mathworks, Natick, MA.
9. Alan Rosenbluth, private communication.
10. D. Lee, A.R. Neureuther et al., SPLAT v5.0 User's Guide. Berkeley: U. Cal. Press (1995).
11. PROLITH v7.1, KLA-Tencor, San Jose, CA.