Pupil-fill imperfections and their effect on lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 III, Issue , 2003, Pages 1465-1476

  Renwick, Stephen P ^a   Slonaker, Steven D ^a  

^a NIKON PRECISION INC   (United States)

Author keywords

CD control; HV bias; Illuminator; Partial coherence; Pupil fill; Pupilgram; Sigma; Uniformity

Indexed keywords

ABERRATIONS; COHERENT LIGHT; CORRELATION METHODS; LENSES; MATHEMATICAL MODELS; SCANNING;

ILLUMINATOR; LITHOGRAPHIC TOOL; NOISE LEVEL; PARTIAL-COHERENCE PATTERN; PUPIL-FILL IMPERFECTIONS;

PHOTOLITHOGRAPHY;

EID: 0141498283     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485444     Document Type: Conference Paper

References (8)

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