Uncooled membrane-type linear microbolometer array based on a VOx film

Journal of Optical Technology (A Translation of Opticheskii Zhurnal)

Volumn 68, Issue 6, 2001, Pages 428-431

  Zerov, V Yu ^a   Malyarov, V G ^a   Khrebtov, I A ^a   Kulikov, Yu V ^a   Shaganov, I I ^a   Smirnov, A D ^b  

^a VAVILOV STATE OPTICAL INSTITUTE   (Russian Federation)

^b Svetlana Elektronpribor Company   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

MICROBOLOMETER ARRAYS (MBA);

ANISOTROPY; ARRAYS; ETCHING; INFRARED RADIATION; LINEAR SYSTEMS; SILICON WAFERS; THIN FILMS; TOPOLOGY; VANADIUM COMPOUNDS;

BOLOMETERS;

EID: 0141484567     PISSN: 10709762     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOT.68.000428     Document Type: Article

References (12)

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