Uncooled thermal IR detector arrays

Journal of Optical Technology (A Translation of Opticheskii Zhurnal)

Volumn 64, Issue 6, 1997, Pages 511-522

  Khrebtov, I A ^a   Malyarov, V G ^a  

^a VAVILOV STATE OPTICAL INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1842802196     PISSN: 10709762     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

References (68)

1. J. M. Lloyd, ed., Thermal Imaging Systems (Plenum Press, 1975; Mir, Moscow, 1978).
2. R. A. Wood and N. A. Foss, "Micromachined bolometer arrays achieve low-cost imaging," Laser Focus World 29, No. 6, 101 (1993).
3. V. G. Erofeǐchev, "Infrared focal arrays," Opt. Zh. 62, No. 2, 3 (1995) [J. Opt. Technol. 62, 73 (1995)].
4. V. G. Erofeǐchev, "Infrared focal arrays," Opt. Zh. 62, No. 2, 3 (1995) [J. Opt. Technol. 62, 73 (1995)].
5. N. A. Pankratov, "Thin-film pyroelectric radiation detectors," Opt. Zh. 63, No. 5, 16 (1996) [J. Opt. Technol. 63, 343 (1996)].
6. N. A. Pankratov, "Thin-film pyroelectric radiation detectors," Opt. Zh. 63, No. 5, 16 (1996) [J. Opt. Technol. 63, 343 (1996)].
7. R. J. Keyes, ed., Optical and Infrared Detectors (Springer-Verlag, New York, 1977; Radio i Svyaz', Moscow, 1985).
8. M. A. Trishenkov, Photodetector devices and CCDs (Radio i Svyaz', Moscow, 1992).
9. E. A. Newman and P. H. Hartline, "The infrared 'vision' of snakes," Sci. Am. 246, 116 (1982).
10. R. E. Flannery and J. E. Miller, "Status of uncooled infrared imagers," Proc. SPIE 1689, 379 (1992).
11. S. Horn and R. Buser, "Uncooled sensor technology," Proc SPIE 2020, 304 (1993).
12. R. A. Wood, "Uncooled thermal imaging with monolithic silicon focal planes," Proc. SPIE 2020, 322 (1993).
13. M. A. Gallo, D. S. Willits, R. A. Lubke, and E. C. Thiede, "Low-cost uncooled IR sensor for battlefield surveillance," Proc. SPIE 2020, 351 (1993).
14. R. Owen, S. Frank, and C. Daz, "Producibility of uncooled IR FRA detectors," Proc. SPIE 1683, 74 (1992).
15. C. Hanson, "Uncooled thermal imaging at Texas Instruments," Proc. SPIE 2020, 330 (1993).
16. R. Owen, J. Belcher, H. Beratan, and S. Frank, "Producibility advances in hybrid uncooled infrared devices," Proc. SPIE 2225, 79 (1994).
17. K. C. Liddiard, "Thin-film resistance bolometer IR detectors," Infrared Phys. 24, 57 (1984).
18. K. C. Liddiard, "Thin-film resistance bolometer IR detectors. II," Infrared Phys. 26, 3 (1986).
19. K. C. Liddiard, "Thin-film monolithic detector arrays for uncooled thermal imaging," Proc. SPIE 1969, 206 (1993).
20. K. C. Liddiard, M. H. Unewisse, and O. Reinhold, "Design and fabrication of thin-film monolithic uncooled infrared detector arrays," Proc. SPIE 2225, 62 (1994).
21. K. C. Liddiard, U. Ringh, and C. Jansson, "Staring focal plane arrays for advanced ambient temperature infrared sensors," Proc. SPIE 2552, 564 (1995).
22. M. H. Unewisse, K. C. Liddiard, B. I. Craig et al., "Semiconductor film bolometer technology for uncooled IR sensor," Proc. SPIE 2552, 77 (1995).
23. R. Watton, P. N. J. Dennis, J. P. Gillham et al., "IR bolometer arrays: The route to uncooled, affordable thermal imaging," Proc. SPIE 2020, 379 (1993).
24. S. G. Porter, R. Watton, and R. K. McEwen, "Ferroelectric arrays: The route to low-cost uncooled infrared imaging," Proc. SPIE 2552, 573 (1995).
25. V. Norkus, C. Plehnert et al., "Pyroelectric multispectral detectors and their applications," Proc. SPIE 2225, 87 (1994).
26. T. Kanno, M. Saga, S. Matsumoto et al., "Uncooled infrared focal plane array having 128X 128 thermopile detector elements," Proc. SPIE 2269, 450 (1994).
27. R. Lenggenhager, H. Baltes, J. Peer, and M. Forster, "Thermoelectric infrared sensors by CMOS technology," IEEE Electron Device Lett. 13, 454 (1992).
28. I. A. Khrebtov, "Superconducting infrared and submillimeter radiation receivers," Opt. Zh. 58, No. 5, 3 (1991) [Sov. J. Opt. Technol. 58, 261 (1991)].
29. I. A. Khrebtov, "Superconducting infrared and submillimeter radiation receivers," Opt. Zh. 58, No. 5, 3 (1991) [Sov. J. Opt. Technol. 58, 261 (1991)].
30. V. N. Leonov and I. A. Khrebtov, "Antenna thermal radiation detectors," Prib. Tekh. Éksp. No. 4, 11 (1993).
31. N. A. Pankratov, "Modern semiconductor thermoelectric radiation detectors," Opt. Zh. 60, No. 8, 20 (1993) [Sov. J. Opt. Technol. 60, 522 (1993)].
32. N. A. Pankratov, "Modern semiconductor thermoelectric radiation detectors," Opt. Zh. 60, No. 8, 20 (1993) [Sov. J. Opt. Technol. 60, 522 (1993)].
33. N. A. Pankratov, "State-of-the-art optical-acoustic detectors," Opt. Zh. 61, No. 5, 3 (1994) [J. Opt. Technol. 61, 359 (1994)].
34. N. A. Pankratov, "State-of-the-art optical-acoustic detectors," Opt. Zh. 61, No. 5, 3 (1994) [J. Opt. Technol. 61, 359 (1994)].
35. L. S. Kremenchugskiǐ and O. V. Roǐtsina, Pyroelectric Radiation Detectors (Naukova Dumka, Kiev, 1979).
36. S. A. Jensen, "Limitations to room temperature IR imaging systems," Proc. SPIE 2020, 340 (1993).
37. P. L. Marasco and E. L. Dereniak, "Uncooled infrared sensor performance," Proc. SPIE 2020, 363 (1993).
38. I. I. Taubkin and M. A. Trishenkov, "Theoretically limited temperature sensitivity of thermal detectors with restricted spectral range," Proc. SPIE 2225, 97 (1994).
39. P. W. Kruse, "A comparison of the limits to the performance of thermal and photon detector imaging arrays," Infrared Phys. Technol. 46, 869 (1995).
40. N. A. Pankratov and V. G. Malyarov, "Detector layout of a submillimeter photometer," Zh. Prikl. Spektrosk. 42, 1028 (1985).
41. T. A. Enukova, Yu. V. Kulikov, V. G. Malyarov, and A. V. Osipov, "Bolometric detector head for cryogenic magnetospectroscopy in the far IR," Prib. Tekh. Éksp. No. 4, 191 (1994).
42. M. N. Unewisse, B. I. Craig, R. J. Watson, and K. C. Liddiard, "The growth and properties of semiconductor film bolometers for infrared detection," Proc. SPIE 2554, 43 (1995).
43. F. A. Chudnovskǐ, "Metal-semiconductor phase transition in vanadium oxides and its technical application," Zh. Tekh. Fiz. 45, 1561 (1975) [Sov. Phys. Tech. Phys. 20, 999 (1975)].
44. F. A. Chudnovskǐ, "Metal-semiconductor phase transition in vanadium oxides and its technical application," Zh. Tekh. Fiz. 45, 1561 (1975) [Sov. Phys. Tech. Phys. 20, 999 (1975)].
45. P. Umadevi, C. L. Nagendra, G. K. M. Thutupalli et al., "A new thermistor material for thermistor bolometer: Material preparation and characterization," Proc. SPIE 1485, 195 (1991).
46. H. Jerominek, F. Picard, and D. Vicent, "Vanadium oxide films for optical switching and detection," Opt. Eng. 32, 2092 (1993).
47. N. Butler, R. Blackwell, R. Murphy et al., "Low-cost uncooled microbolometer imaging system for dual use," Proc. SPIE 2552, 583 (1995).
48. S. Baliga, M. Rost, and A. Doctor, "Sputtered film thermistor IR detectors," Proc. SPIE 2225, 72 (1994).
49. V. V. Veremeǐ and N. A. Pankratov, "Interference phenomena in semiconductor bolometers," Opt. Mekh. Prom. 41, No. 4, 10 (1974) [Sov. J. Opt. Technol. 41, 199 (1974)].
50. V. V. Veremeǐ and N. A. Pankratov, "Interference phenomena in semiconductor bolometers," Opt. Mekh. Prom. 41, No. 4, 10 (1974) [Sov. J. Opt. Technol. 41, 199 (1974)].
51. D. L. Polla, P. F. Baude, Z. Pham et al., "Micromachined infrared detectors based on pyroelectric thin films," Proc. SPIE 2552, 602 (1995).
52. J.-L. Coutures, R. Lemaitre, E. Pourquier et al., "Uncooled infrared monolithic imaging sensor using pyroelectric polymer," Proc. SPIE 2552, 748 (1995).
53. P. W. Kruse, "Thermal imagers move from military to marketplace," Photonics Spec. 29, No. 3, 103 (1995).
54. ™ camera," Proc. SPIE 2552, 654 (1995).
55. R. A. Wood, "Camera for producing video output signal, infrared focal plane array package for such camera, and method and apparatus for generating video signal from passive focal plane array of elements on a semiconductor substrate," U.S. Patent No. 5,420,419, U. S. Class 250-338.4, May 30, 1995.
56. C. Jansson, U. Ringh, and K. C. Liddiard, "Theoretical analysis of pulse bias heating of resistance bolometer infrared detectors and effectiveness of bias compensation," Proc. SPIE 2552, 644 (1995).
57. U. Ringh, K. C. Liddiard, and C. Jansson, "On-chip analog-to-digital conversion suitable for uncooled for focal plane arrays employed in smart IR sensors," Proc. SPIE 2474, 72 (1995).
58. M. Ueno, O. Kaneda, T. Ishikawa et al., "Monolithic uncooled infrared image sensor with 160X 120 pixels," Proc. SPIE 2552, 636 (1995).
59. R. J. Kyle and D. Van Doner, "Uncooled infrared imaging systems for law enforcement," Proc. SPIE 2497, 98 (1995).
60. K. C. Liddiard and G. L. Goodman, "Versatile high-performance infrared intrusion sensor for remote surveillance applications," Proc. SPIE 2552, 685 (1995).
61. R. J. Herring and P. Howard, "Design and performance of the ULTRA 320X 240 uncooled focal-plane array and sensor," Proc. SPIE 2746, Paper 2746-02 (1996).
62. B. Meyer, A. Stout, A. Gin et al., "Amber's uncooled microbolometer LWIR camera," Proc. SPIE 2746, Paper 2746-04 (1996).
63. 2-based IR linear bolometer arrays," Proc. SPIE 2746, Paper 2746-41 (1996).
64. G. T. Teowee, K. McCarthy, and J. M. Boulton, "Sol-gel derived ferroelectric films as pyroelectric detectors in imaging applications," Proc. SPIE 2746, Paper 2746-07 (1996).
65. K. C. Liddiard, U. Ringh, and C. Jasson, "Status of uncooled focal plane detector arrays for smart IR sensors," Proc. SPIE 2746, Paper 2746-03 (1996).
66. C. A. Marshall, N. R. Butler, R. Blackwell et al., "Uncooled infrared sensors with digital FRA," Proc. SPIE 2746, Paper 2746-06 (1996).
67. W. A. Radford, D. Murphy, K. L. Soch et al., "320X 240 silicon microbolometer uncooled infrared FRA with on-chip offset correction," Proc. SPIE 2746, Paper 2746-09 (1996).
68. J. E. Miller, "Overview and status of room temperature IR sensors," Proc. SPIE 2746, Paper 2746-01 (1996).