Field emission and growth characteristics of carbon nanotubes with optical emission spectroscopy analysis in C3H4 and CO deposition systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 4, 2003, Pages 1720-1726

  Han, Jae Hee ^a   Lee, Tae Young ^a   Yoo, Ji Beom ^a   Park, Chong Yun ^a   Jung, Taewon ^b   Kim, Jong Min ^b   Yu, SeGi ^c   Yi, Whikun ^d  

^a Sungkyunkwan University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c Hankuk University of Foreign Studies   (South Korea)

^d Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CRYSTAL GROWTH; ELECTRON EMISSION; EMISSION SPECTROSCOPY; GRAPHITIZATION; MORPHOLOGY; PLASMA DIAGNOSTICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTION KINETICS;

FIELD EMISSION PROPERTIES;

CARBON NANOTUBES;

EID: 0141458082     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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