SCOPUS 정보 검색 플랫폼

Volumn 11, Issue 1, 2002, Pages 59-66

In situ diagnosis of chemical species for the growth of carbon nanotubes in microwave plasma-enhanced chemical vapor deposition

(6) Woo, Yun Sung a Jeon, Duk Young a Han, In Taek b Lee, Nae Sung b Jung, Jae Eun b Kim, Jong Min b

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

b Samsung Advanced Institute of Technology (SAIT) (South Korea)

Author keywords

Carbon nanotube; Chemical vapor deposition; Emission spectroscopy; Mass spectrometry

Indexed keywords

EMISSION SPECTROSCOPY; MASS SPECTROMETRY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SYNTHESIS (CHEMICAL);

MULTI-WALL CARBON NANOTUBES (MWNT); OPTICAL EMISSION SPECTROSCOPY (OES);

CARBON NANOTUBES;

NANOTUBE;

EID: 0036156618 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(01)00519-2 Document Type: Article

Times cited : (56)

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