Optical constants of DC magnetron sputtered titanium dioxide thin films measured by spectroscopic ellipsometry

Crystal Research and Technology

Volumn 38, Issue 9, 2003, Pages 773-778

  Karunagaran, B ^a   Rajendra Kumar, R T ^a   Viswanathan, C ^a   Mangalaraj, D ^a   Narayandass, Sa K ^a   Mohan Rao, G ^b  

^a BHARATHIAR UNIVERSITY   (India)

^b INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

DC magnetron sputtering; Optical constants; Spectroscopic ellipsometry; TiO2 thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; BAND STRUCTURE; ELECTRON TRANSITIONS; ELLIPSOMETRY; LIGHT ABSORPTION; MAGNETRON SPUTTERING; PERMITTIVITY; PHOTONS; REFRACTIVE INDEX; SPECTROSCOPY; THIN FILMS;

ABSORPTION COEFFICIENT; EXTINCTION COEFFICIENT; OPTICAL CONSTANTS; OPTICAL TRANSMITTANCE MEASUREMENT; SPECTROSCOPIC ELLIPSOMETRY;

TITANIUM DIOXIDE;

EID: 0141457826     PISSN: 02321300     EISSN: None     Source Type: Journal    
DOI: 10.1002/crat.200310094     Document Type: Article

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