A study of sputtering process for nanocrystalline FeAlN soft magnetic thin films

Materials Science and Engineering: B

Volumn 103, Issue 3, 2003, Pages 233-240

  Ma, Yungui ^a   Li, Xiaohong ^a   Xie, Tian ^a   Wei, Fulin ^a   Yang, Zheng ^a  

^a LANZHOU UNIVERSITY   (China)

Author keywords

Amorphous films; Nanocrystalline FeAlN magnetic thin films; Sputtering

Indexed keywords

AMORPHOUS FILMS; COERCIVE FORCE; CRYSTALLIZATION; MICROSTRUCTURE; MORPHOLOGY; NANOSTRUCTURED MATERIALS; SPUTTERING; THERMODYNAMIC STABILITY;

EX-SITU PROCESS;

MAGNETIC THIN FILMS;

EID: 0141427839     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(03)00239-3     Document Type: Article

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