Thick porous silicon thermo-insulating membranes

Sensors and Materials

Volumn 11, Issue 3, 1999, Pages 131-147

  Maccagnani, Piera ^a   Angelucci, Renato ^a   Pozzi, Paolo ^a   Dori, Leonello ^a   Parisini, Andrea ^a   Bianconi, Marco ^a   Benedetto, Giuliana ^b  

^a CNR   (Italy)

^b ISTITUTO ELETTROTECNICO NAZIONALE GALILEO FERRARIS   (Italy)

Author keywords

Dielectric membranes; Porous silicon; Porous silicon membranes; Porous silicon nitridation; Porous silicon oxidation

Indexed keywords

EID: 0033450470     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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