SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Sensors and Actuators, A: Physical

Volumn 70, Issue 1-2, 1998, Pages 185-190

Determination of the modification of Young's modulus due to Joule heating of polysilicon microstructures using U-shaped beams

(2) Yang, Eui Hyeok a Fujita, Hiroyuki a

a INSTITUTE OF INDUSTRIAL SCIENCE (Japan)

Author keywords

Joule heating; Polysilicon microstructure; Reshaping technology; U shaped beam; Young's modulus modification

Indexed keywords

EID: 0043138975 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(98)00131-9 Document Type: Article

Times cited : (5)

References (7)

1
- 0025839036
- Thermal assembly of polysilicon microstructures
- Nara, Japan, January 30-February 2
- G. Fedder, R. Howe, Thermal assembly of polysilicon microstructures, EEEE Int. Workshop on Microelectromechanical Systems '91, Nara, Japan, January 30-February 2, 1991, pp. 63-68.
- (1991) EEEE Int. Workshop on Microelectromechanical Systems '91 , pp. 63-68
- Fedder, G.¹ Howe, R.²

2
- 0025840974
- Polysilicon microstructures
- Nara, Japan, January 30-February 2
- M.M. Farroqui, A.G.R. Evans, Polysilicon microstructures, IEEE Int. Workshop on Microelectromechanical Systems '91, Nara, Japan, January 30-February 2, 1991, pp. 187-191.
- (1991) IEEE Int. Workshop on Microelectromechanical Systems '91 , pp. 187-191
- Farroqui, M.M.¹ Evans, A.G.R.²

3
- 0030679105
- Microactuated self-assembling of 3D polysilicon structures with reshaping technology
- Nagoya, Japan, January 26-30
- Y. Fukuta, D. Collard, T. Akiyama, E.H. Yang, H. Fujita, Microactuated self-assembling of 3D polysilicon structures with reshaping technology, IEEE Int. Workshop on Microelectromechanical Systems '97, Nagoya, Japan, January 26-30,1997, pp. 477-481.
- (1997) IEEE Int. Workshop on Microelectromechanical Systems '97 , pp. 477-481
- Fukuta, Y.¹ Collard, D.² Akiyama, T.³ Yang, E.H.⁴ Fujita, H.⁵

4
- 0043286756
- The reshaping technology for three dimensional polysilicon microstructures
- Y. Fukuta, T. Akiyama, H. Fujita, The reshaping technology for three dimensional polysilicon microstructures, Trans. IEE Jpn. 117-E (1997) 20-26.
- (1997) Trans. IEE Jpn. , vol.117 E , pp. 20-26
- Fukuta, Y.¹ Akiyama, T.² Fujita, H.³

5
- 0026976496
- Determination of Young's moduli of micromachined thin films using the resonance method
- L. Kiesewetter, J.-M. Zhang, D. Houdeau, A. Steckenborn, Determination of Young's moduli of micromachined thin films using the resonance method, Sensors and Actuators A 35 (1992) 153-159.
- (1992) Sensors and Actuators A , vol.35 , pp. 153-159
- Kiesewetter, L.¹ Zhang, J.-M.² Houdeau, D.³ Steckenborn, A.⁴

6
- 0042284502
- An ultra-high yield bulk-micromachining process by using a polyimide layer
- Chicago, IL, USA, June 16-19
- E.H. Yang, H. Fujita, An ultra-high yield bulk-micromachining process by using a polyimide layer, Tech. Digest, 9th Int. Conf. Solid-State Sensors and Actuators (Transducers '97), Chicago, IL, USA, June 16-19, 1997, p. 110.
- (1997) Tech. Digest, 9th Int. Conf. Solid-state Sensors and Actuators (Transducers '97) , pp. 110
- Yang, E.H.¹ Fujita, H.²

7
- 0030653156
- Frequency trimming and Q-factor enhancement of micromachined resonators via localized filament annealing
- Chicago, D, USA, June 16-19
- K. Wang, A.C. Wang, W.T. Hsu, C.T.-C. Nguyen, Frequency trimming and Q-factor enhancement of micromachined resonators via localized filament annealing, Tech. Digest, 9th Int. Conf. Solid State Sensors and Actuators (Transducers '97), Chicago, D, USA, June 16-19, 1997, pp. 109-112.
- (1997) Tech. Digest, 9th Int. Conf. Solid State Sensors and Actuators (Transducers '97) , pp. 109-112
- Wang, K.¹ Wang, A.C.² Hsu, W.T.³ Nguyen, C.T.-C.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.