The Reshaping Technology for Three Dimensional Polysilicon Microstructures

IEEJ Transactions on Sensors and Micromachines

Volumn 117, Issue 1, 1997, Pages 20-26

  Fukuta, Yamato ^a   Akiyama, Terunobu ^a   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

3 D microstructure; micromachining; plastic deformation; polysilieon

Indexed keywords

EID: 0043286756     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.117.20     Document Type: Article

References (0)