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Volumn 6, Issue 9, 1997, Pages 1172-1181

The activation energy for diamond growth from CCl4/H2 mixtures in a hot-filament reactor

Author keywords

Activation energy; CVD diamond; Halide chemistry

Indexed keywords


EID: 0043137766     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00044-7     Document Type: Article
Times cited : (13)

References (47)
  • 12
    • 0028743269 scopus 로고
    • C.L. Renschler, D.M. Cox, J.J. Pouch, Y. Achiba (Eds.), Novel Forms of Carbon II, Materials Research Society, San Francisco, CA
    • C. Pan, J.L. Margrave, R.H. Hauge, in C.L. Renschler, D.M. Cox, J.J. Pouch, Y. Achiba (Eds.), Mater. Res. Soc. Symp. Proc., vol 349, Novel Forms of Carbon II, Materials Research Society, San Francisco, CA, 1994, p. 427.
    • (1994) Mater. Res. Soc. Symp. Proc. , vol.349 , pp. 427
    • Pan, C.1    Margrave, J.L.2    Hauge, R.H.3
  • 13
    • 0002789001 scopus 로고
    • A.J. Purdes, B.M. Meyerson, J.C. Angus, K.E. Spear, R.F. Davis, M. Yoder (Eds.), The Electrochemical Society, Inc., Washington, DC, USA
    • nd Intern. Symp. On Diamond Materials, The Electrochemical Society, Inc., Washington, DC, USA, 1991, p. 142.
    • (1991) nd Intern. Symp. on Diamond Materials , pp. 142
    • Frenklach, M.1
  • 15
    • 0029780023 scopus 로고
    • P. Pehrsson et al. (Eds.), Diamond for Electronic Applications, Materials Research, Boston, MI
    • R.E. Rawles, W.G. Morris, M.P.D'Evelyn, in P. Pehrsson et al. (Eds.), Mater. Res. Soc. Symp. Proc., vol 416, Diamond for Electronic Applications, Materials Research, Boston, MI, 1995, p. 13.
    • (1995) Mater. Res. Soc. Symp. Proc. , vol.416 , pp. 13
    • Rawles, R.E.1    Morris, W.G.2    D'Evelyn, M.P.3
  • 28
    • 0000500710 scopus 로고    scopus 로고
    • Low temperature diamond growth using halogenated hydrocarbons
    • I. Schmidt, F. Hentschel, C. Benndorf, Low temperature diamond growth using halogenated hydrocarbons. Diamond Relat. Mater. 5 (1996) 1318-1322.
    • (1996) Diamond Relat. Mater. , vol.5 , pp. 1318-1322
    • Schmidt, I.1    Hentschel, F.2    Benndorf, C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.