H actinometry with CF4 addition in microwave plasma-assisted chemical vapor deposition of diamond

Diamond and Related Materials

Volumn 6, Issue 2-4, 1997, Pages 472-475

  Ferreira, N G ^a   Corat, E J ^a   Trava Airoldi, V J ^a   Leite, N F ^a   Mendes De Barros, R C ^b  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

^b INSTITUTO TECNOLÓGICO DE AERONÁUTICA   (Brazil)

Author keywords

Actinometry; Diamond; Microwave plasma assisted chemical vapor deposition

Indexed keywords

EID: 0041783982     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00637-1     Document Type: Article

References (12)

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