Progress in submicron width ion beam system using double acceleration lenses

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 210, Issue , 2003, Pages 70-74

  Ishii, Y ^a   Isoya, A ^a,b   Kojima, T ^a  

^a TAKASAKI ADVANCED RADIATION RESEARCH INSTITUTE   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

Acceleration lens; Duoplasmatron type ion source; Pierce angle; Plasma sheath; Submicron ion beam system

Indexed keywords

ANODES; ION BEAMS; LENSES; PLASMA SHEATHS;

ACCELERATION LENSES;

PARTICLE ACCELERATORS;

EID: 0043015764     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)01020-6     Document Type: Conference Paper

References (9)

1. Grime G.W., Dawson M., March M., McArthur I.C., Watt F. Nucl. Instr. and Meth. B. 54:1991;52.
2. Kamiya T., Suda T., Tanaka R. Nucl. Instr. and Meth. B. 104:1995;363.
3. Osipowicz T., van Kan J.A., Sum T.C., Sanchez J.L., Watt F. Nucl. Instr. and Meth. B. 161:2000;83.
4. Ishii Y., Isoya A., Arakawa K., Kojima T., Tanaka T. Nucl. Instr. and Meth. B. 181:2001;71.
5. Nucl. Instr. and Meth. (in press).
6. Isoya A. ULVAC Tech. J. 44:1996;42. in Japanese.
7. A. Isoya, Proceedings of the International Conference on Application of Nuclear Techniques, Crete, Greece, June 1991, p. 334.
8. Ishii Y., Tanaka R., Isoya A. Nucl. Instr. and Meth. B. 113:1996;75.
9. Biersack P., Haggmark L. Nuc. Instr. and Meth. 174:1980;257.