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Volumn 38, Issue 7-8, 2003, Pages 716-725
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Numerical study of the effects of cusp-shaped magnetic fields and thermal conductivity on the melt-crystal interface in CZ crystal growth
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Author keywords
Computer simulation; Cusp shaped magnetic fields; Czochralski method; Electromagnetic force; Semiconducting silicon
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Indexed keywords
MAGNETIC FIELD EFFECTS;
PHASE INTERFACES;
SEMICONDUCTING SILICON;
SEMICONDUCTOR GROWTH;
THERMAL CONDUCTIVITY;
CRYSTAL QUALITY;
CRYSTAL GROWTH FROM MELT;
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EID: 0042971990
PISSN: 02321300
EISSN: None
Source Type: Journal
DOI: 10.1002/crat.200310086 Document Type: Article |
Times cited : (22)
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References (18)
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