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Volumn 13, Issue 2 I, 2003, Pages 817-820
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Fabrication of YBCO multi-layer wiring with a polished PBCO insulator
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Author keywords
High temperature superconductors; Multi layer structure; Polishing technique; Superconducting devices
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Indexed keywords
HIGH TEMPERATURE SUPERCONDUCTORS;
MULTILAYERS;
PHOTOLITHOGRAPHY;
POLISHING;
SUPERCONDUCTING FILMS;
YTTRIUM BARIUM COPPER OXIDES;
FILM PATTERNINGS;
ION MILLINGS;
SUPERCONDUCTING WIRE;
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EID: 0042942746
PISSN: 10518223
EISSN: None
Source Type: Journal
DOI: 10.1109/TASC.2003.814052 Document Type: Conference Paper |
Times cited : (2)
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References (5)
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