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Volumn 174-175, Issue , 2003, Pages 498-502
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Bifocal plasma source for treatment of gaseous pollutants
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Author keywords
Atmospheric plasma; Halogen; PACVD; Pollutant; Volatile organic compunds (VOC); Waste gas
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Indexed keywords
ATMOSPHERIC PRESSURE;
HAZARDOUS MATERIALS;
MICROWAVES;
POLLUTION CONTROL;
GASEOUS POLLUTANTS;
PLASMA SOURCES;
COATING;
INDUSTRIAL APPLICATION;
PLASMA;
SURFACE PROPERTY;
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EID: 0042829257
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(03)00622-4 Document Type: Article |
Times cited : (5)
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References (11)
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