Ion-beam etching for the precise manufacture of optical coatings

Applied Optics

Volumn 42, Issue 19, 2003, Pages 4037-4044

  Poitras, Daniel ^a   Dobrowolski, J A ^a   Cassidy, Tom ^a   Moisa, Simona ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; ION BEAMS; MULTILAYERS; SPUTTERING; THIN FILMS;

ETCH MODES;

OPTICAL COATINGS;

EID: 0042810716     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.004037     Document Type: Article

References (14)

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