Semiconductor material analysis based on microcalorimeter EDS

Microelectronics Reliability

Volumn 43, Issue 9-11, 2003, Pages 1675-1680

  Simmnacher, B ^a   Weiland, R ^a   Hohne J ^b   Feilitzsch, F V ^c   Hollerith, C ^c  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b VeriCold Technologies GmbH   (Germany)

^c TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETERS; ENERGY DISPERSIVE SPECTROSCOPY; FAILURE ANALYSIS; INTEGRATED CIRCUITS; WAVELENGTH DISPERSIVE SPECTROSCOPY; X RAY SPECTROSCOPY;

MICROCALORIMETERS;

SEMICONDUCTOR MATERIALS;

EID: 0042694365     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(03)00304-4     Document Type: Conference Paper

References (7)

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3. D.A. Wollman, K.D. Irwin, G.C. Hilton, L.L. Dulcie, D.A. Newbury, J.M. Martinis. High-resolution, energy-dispersive microcalorimeter spectrometer for x-ray microanalysis. J. Microscopy, Vol. 188, pp 196-223, 1997.
4. B. Simmnacher, R. Weiland, E. Langer, M. Bühler, J. Höhne, C. Hollerith. Microcalorimeter Energy Dispersive X-ray Spectroscopy in Routine Semiconductor Failure Analysis. Proceedings of the 28th Symposium for Testing and Failure Analysis (ISTFA), Phoenix/AZ, November 2002, pp 87-92
5. D. Redfern, J. Nicolosi, J. Höhne, R. Weiland, B. Simmnacher and C. Hollerith. The Microcalorimeter for Industrial Applications. Journal of Research of the National Institute of Standards and Technology, Vol. 107 (6), Nov.-Dec. 2002, pp 621-626
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