The microcalorimeter for industrial applications

Journal of Research of the National Institute of Standards and Technology

Volumn 107, Issue 6, 2002, Pages 621-626

  Redfern, Del ^a   Nicolosi, Joe ^a   Höhne, Jens ^b   Weiland, Rainer ^c   Simmnacher, Birgit ^c   Hollerich, Christian ^d  

^a EDAX Mahwah   (United States)

^b CSP Cryogenic Spectrometers GmbH   (Germany)

^c INFINEON TECHNOLOGIES AG   (Germany)

^d TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Cryogen free cooling; Energy resolution; Microcalorimeter energy dispersive; Transition edge sensor; X ray microanalysis; X ray spectrometer

Indexed keywords

CRYOGENIC EQUIPMENT; CRYOGENIC LIQUIDS; DEMAGNETIZATION; ELECTRIC POTENTIAL; ENERGY DISPERSIVE SPECTROSCOPY; INDUSTRIAL APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SENSORS; SUPERCONDUCTING DEVICES;

TRANSITION EDGE SENSORS;

CALORIMETERS;

EID: 0036874806     PISSN: 1044677X     EISSN: None     Source Type: Journal    
DOI: 10.6028/jres.107.050     Document Type: Conference Paper

References (5)

1. The National Technology Roadmap for Semiconductors, The Semiconductor Industry Association, 4300 Stevens Creek Boulevard, Suite 271, San Jose, CA 95129 (1997).
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3. C. Boit, R. Weiland, A. Olbrich, U. Mühle, and B. Simmnacher, Failure Analysis Concepts for Microelectronics Technologies and Manufacturing of the Future, Edinburgh EMM-Conference Proceedings (2001).
4. J. Höhne, M Altman, G. Angloher, P. Hettl, J. Jochum, T. Nüßle, S. Pfnür, J. Schnagl, M. L. Sarsa, S. Wänninger, F. v. Feilitzsch, High Resolution X-Ray Spectroscopy Using Iridium/Gold Phase Transition Thermometers, EDXRF Bologna (1998).
5. D. A. Wollman, S. W. Nam, D. E. Newbury, G. C. Hilton, K. D. Irwin, N. F. Bergen, S. Deiker, D. A. Rudman, J. M. Martinis, Superconducting transition-edge-microcalorimeter x-ray spectrometer with 2 eV energy resolution at 1.5 keV, Nucl. Instr. Meth. A 444, 145-150 (2000).